Patent Assignment
Reel/Frame 029783/0227
Assignment of Assignor's Interest
Recorded: 2013-02-08
Pages: 3
Assignee
SINFONIA TECHNOLOGY CO., LTD.
1-30, SHIBA-DAIMON 1-CHOME, MINATO-KU, TOKYO, 105-8564, JAPAN
Covered Property
(1)
Purge Nozzle Unit, Purge Apparatus and Load Port