Patent Assignment
Reel/Frame 029805/0897
Assignment of Assignor's Interest
Recorded: 2013-02-13
Pages: 2
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device