Patent Assignment
Reel/Frame 029806/0686
Assignment of Assignor's Interest
Recorded: 2013-02-13
Pages: 14
Assignors
SADJADI, S.M. REZA
Executed: 2013-02-06
LUBOMIRSKY, DMITRY
Executed: 2013-02-06
NOORBAKHSH, HAMID
Executed: 2013-02-06
YE, JOHN ZHENG
Executed: 2013-02-06
QUACH, DAVID H.
Executed: 2013-02-13
KANG, SEAN S.
Executed: 2013-01-07
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods and Apparatus for Controlling Substrate Uniformity