Patent Assignment
Reel/Frame 029811/0251
Assignment of Assignor's Interest
Recorded: 2013-02-14
Pages: 3
Assignors
YANG, YAO-HUNG
Executed: 2012-07-07
OH, JEONGHOON
Executed: 2012-07-09
HOOSHDARAN, FRANK F.
Executed: 2012-07-09
CHO, TOM K.
Executed: 2012-07-12
HOU, TAO
Executed: 2012-06-28
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus for Substrate Support with Multi-Zone Heating