Patent Assignment
Reel/Frame 029824/0387
Assignment of Assignor's Interest
Recorded: 2013-02-18
Pages: 12
Assignors
HIRAYAMA, MASAKI
Executed: 2013-01-08
OHMI, TADAHIRO
Executed: 2012-12-28
HORIGUCHI, TAKAHIRO
Executed: 2012-12-25
Assignees
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
TOHOKU UNIVERSITY
1-1, KATAHIRA 2-CHOME, AOBA-KU, SENDAI-SHI, MIYAGI, 980-8577, JAPAN
Covered Property
(1)
Plasma Processing Apparatus