Patent Assignment
Reel/Frame 029846/0269
Assignment of Assignor's Interest
Recorded: 2013-02-21
Pages: 4
Assignors
LIN, CHIN-TSUNG
Executed: 2012-12-28
HSIEH, HSIAO-YIN
Executed: 2012-12-28
HUANG, CHI-HAO
Executed: 2012-12-28
CHOU, HONG-SHING
Executed: 2012-12-28
WANG, YEH-CHIEH
Executed: 2013-01-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Arc Chamber with Multiple Cathodes for an Ion Source