Patent Assignment
Reel/Frame 029847/0636
Assignment of Assignor's Interest
Recorded: 2013-02-21
Pages: 3
Assignors
HIRAKAWA, OSAMU
Executed: 2013-01-24
YOSHITAKA, NAOTO
Executed: 2013-01-27
MATSUNAGA, MASATAKA
Executed: 2013-01-24
OKAMOTO, NORIHIKO
Executed: 2013-02-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Separation System, Separation Method, Program and Computer Storage Medium