Assignment of Assignor's Interest

Recorded: 2013-02-21 Pages: 6

Assignors

KOMIYA, HIROSHI

Executed: 2013-02-20

ESHIMA, KAZUYOSHI

Executed: 2013-02-20

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Liquid Processing Apparatus, Liquid Processing Method, and Storage Medium That Stores Computer Program for Implementing Liquid Processing Method

Patent: 9,452,397 →

Application: 13/772,550 →

Publication: US 2013/0223180