Patent Assignment
Reel/Frame 029859/0217
Assignment of Assignor's Interest
Recorded: 2013-02-22
Pages: 3
Assignors
CHANDRASHEKAR, ANAND
Executed: 2013-02-12
JENG, ESTHER
Executed: 2013-02-12
HUMAYUN, RAASHINA
Executed: 2013-02-12
DANEK, MICHAL
Executed: 2013-02-12
GAO, JUWEN
Executed: 2013-02-19
WANG, DEQI
Executed: 2013-02-12
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Tungsten Feature Fill with Nucleation Inhibition