Patent Assignment
Reel/Frame 029892/0380
Assignment of Assignor's Interest
Recorded: 2013-02-28
Pages: 2
Assignors
WATANABE, TOMOYUKI
Executed: 2012-11-19
MORIMOTO, MICHIKAZU
Executed: 2012-11-19
YAKUSHIJI, MAMORU
Executed: 2012-11-19
ONO, TETSUO
Executed: 2012-11-19
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Etching Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.