Patent Assignment
Reel/Frame 029894/0638
Assignment of Assignor's Interest
Recorded: 2013-02-28
Pages: 4
Assignors
YUASA, KAZUHIRO
Executed: 2013-02-15
FUKUDA, MASANAO
Executed: 2013-02-15
SASAKI, TAKAFUMI
Executed: 2013-02-15
MEGAWA, YASUHIRO
Executed: 2013-02-18
MINAMI, MASAYOSHI
Executed: 2013-02-15
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Processing Substrate and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.