Patent Assignment
Reel/Frame 029913/0786
Assignment of Assignor's Interest
Recorded: 2013-03-04
Pages: 5
Assignors
UMEHARA, YASUTOSHI
Executed: 2013-02-26
OKADA, MOTOI
Executed: 2013-02-22
IWANAGA, SHUJI
Executed: 2013-02-22
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Process Monitoring Device and Process Monitoring Method in Semiconductor Manufacturing Apparatus and Semiconductor Manufacturing Apparatus