Patent Assignment
Reel/Frame 029915/0195
Assignment of Assignor's Interest
Recorded: 2013-03-04
Pages: 5
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Semiconductor Device, Method for Manufacturing Semiconductor Device, and Method for Forming Oxide Film