Patent Assignment
Reel/Frame 029923/0510
Assignment of Assignor's Interest
Recorded: 2013-03-05
Pages: 4
Assignors
WAIBLINGER, MARKUS
Executed: 2013-01-29
BUDACH, MICHAEL
Executed: 2013-01-29
SCHERUEBL, THOMAS
Executed: 2013-01-14
BEYER, DIRK
Executed: 2013-01-14
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method for Determining the Performance of a Photolithographic Mask
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.