Patent Assignment
Reel/Frame 029928/0499
Assignment of Assignor's Interest
Recorded: 2013-03-05
Pages: 9
Assignors
WANG, DAIMIAN
Executed: 2013-03-05
KHODYKIN, OLEG
Executed: 2013-03-05
WACK, DANIEL
Executed: 2013-03-05
WANG, LI
Executed: 2013-03-05
LIU, YANWEI
Executed: 2013-03-05
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Phase Grating For Mask Inspection System