Patent Assignment
Reel/Frame 029932/0077
Assignment of Assignor's Interest
Recorded: 2013-03-06
Pages: 6
Assignors
SINGH, VIKRAM
Executed: 2013-02-14
MILLER, TIMOTHY J.
Executed: 2013-02-15
LINDSAY, BERNARD G.
Executed: 2013-02-27
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Plasma Processing with Enhanced Charge Neutralization and Process Control