Patent Assignment
Reel/Frame 029948/0298
Assignment of Assignor's Interest
Recorded: 2013-03-08
Pages: 3
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Transferring Substrate, Method of Manufacturing Semiconductor Device, and State Detecting Program
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.