Patent Assignment
Reel/Frame 029956/0041
Assignment of Assignor's Interest
Recorded: 2013-03-08
Pages: 3
Assignee
LASERTEC CORPORATION
2-10-1 SHIN-YOKOHAMA, KOHOKU-KU, YOKOHAMA, KANAGAWA, 222-8552, JAPAN
Covered Property
(1)
Defect Coordinates Measurement Device, Defect Coordinates Measurement Method, Mask Manufacturing Method, and Reference Mask