Patent Assignment
Reel/Frame 029972/0529
Assignment of Assignor's Interest
Recorded: 2013-03-12
Pages: 11
Assignors
SHCHEGROV, ANDREI V.
Executed: 2013-03-07
ROTTER, LAWRENCE D.
Executed: 2013-02-12
WANG, DAVID Y.
Executed: 2013-02-12
VELDMAN, ANDREI
Executed: 2013-03-07
PETERLINZ, KEVIN
Executed: 2013-03-07
BRADY, GREGORY
Executed: 2013-03-07
SHAUGHNESSY, DERRICK A.
Executed: 2013-03-07
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Optical Metrology Tool Equipped with Modulated Illumination Sources