Patent Assignment
Reel/Frame 029975/0547
Assignment of Assignor's Interest
Recorded: 2013-03-12
Pages: 5
Assignors
DAUGHERTY, JOHN
Executed: 2013-03-04
SHIH, HONG
Executed: 2013-03-04
XU, LIN
Executed: 2013-03-01
AMADIO, ANTHONY
Executed: 2013-03-04
O'NEILL, ROBERT G.
Executed: 2013-03-01
HOLLAND, PETER
Executed: 2013-03-05
RAMANATHAN, SIVAKAMI
Executed: 2013-03-01
KIM, TAE WON
Executed: 2013-03-04
OUTKA, DUANE
Executed: 2013-03-01
KERNS, JOHN MICHAEL
Executed: 2013-03-01
CASTILLO, SONIA
Executed: 2013-03-01
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Corrosion Resistant Aluminum Coating on Plasma Chamber Components