Patent Assignment
Reel/Frame 029980/0606
Assignment of Assignor's Interest
Recorded: 2013-03-11
Received: 2013-03-11
Pages: 3
Assignor
NANOPHOTONICS GMBH
Executed: 2013-01-04
Assignee
RUDOLPH TECHNOLOGIES GERMANY GMBH
GALILEO-GALILEI-STR. 28, 55129 MAINZ, DEX, GERMANY
Covered Properties
(6)
Inspection Device and Inspection Method for the Optical Examination of Object Surfaces, Particularly of Wafer Surfaces
Application:
12/657,744 →
Holding and Turning Device for Touch-Sensitive Flat Objects
Application:
12/311,371 →
Holding Device for Disk-Shaped Objects
Application:
10/913,891 →
Device for Measuring Surface Defects
Application:
10/237,909 →
Measuring Module
Application:
10/120,641 →
Measurement box with module for measuring wafer characteristics
Application:
10/120,639 →