Patent Assignment
Reel/Frame 029982/0210
Assignment of Assignor's Interest
Recorded: 2013-03-13
Pages: 10
Assignors
RADOVANOV, SVETLANA
Executed: 2013-03-11
KOO, BON-WOONG
Executed: 2013-03-11
KURUNCZI, PETER
Executed: 2013-03-13
GODET, LUDOVIC
Executed: 2013-03-12
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Apparatus and Techniques for Energetic Neutral Beam Processing