Patent Assignment
Reel/Frame 029994/0740
Assignment of Assignor's Interest
Recorded: 2013-03-14
Pages: 2
Assignors
SHISHIDO, CHIE
Executed: 2012-12-06
TANAKA, MAKI
Executed: 2012-12-26
SASADA, KATSUHIRO
Executed: 2013-01-18
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Pattern Dimension Measurement Method Using Electron Microscope, Pattern Dimension Measurement System, and Method for Monitoring Changes in Electron Microscope Equipment Over Time