Patent Assignment
Reel/Frame 029997/0935
Assignment of Assignor's Interest
Recorded: 2013-03-14
Pages: 6
Assignors
COLLINS, KENNETH S.
Executed: 2013-03-12
KOBAYASHI, SATORU
Executed: 2013-03-12
WONG, LAWRENCE
Executed: 2013-03-11
LIU, JONATHAN
Executed: 2013-02-27
YANG, YANG
Executed: 2013-03-11
RAMASWAMY, KARTIK
Executed: 2013-03-11
RAUF, SHAHID
Executed: 2013-03-01
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Independent Control of Rf Phases of Separate Coils of an Inductively Coupled Plasma Reactor