Patent Assignment
Reel/Frame 030001/0918
Assignment of Assignor's Interest
Recorded: 2013-03-14
Pages: 6
Assignors
EWERT, MAURICE E.
Executed: 2011-03-18
SUBRAMANI, ANANTHA K.
Executed: 2011-03-22
KELKAR, UMESH M.
Executed: 2011-03-18
BALASUBRAMANYAM, CHANDRASEKHAR
Executed: 2011-03-19
RANISH, JOSEPH M.
Executed: 2011-03-22
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Off-Angled Heating of the Underside of a Substrate Using a Lamp Assembly