Patent Assignment
Reel/Frame 030009/0586
Assignment of Assignor's Interest
Recorded: 2013-03-15
Pages: 4
Assignor
UEDA, TATSUSHI
Executed: 2013-03-11
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method, Substrate Processing Apparatus, and Non-Transitory Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.