Patent Assignment
Reel/Frame 030012/0543
Assignment of Assignor's Interest
Recorded: 2013-03-15
Pages: 3
Assignee
TEL FSI, INC.
3455 LYMAN BLVD., CHASKA, MINNESOTA, 55318
Covered Property
(1)
Process for Silicon Nitride Removal Selective to SiGex
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.