Patent Assignment
Reel/Frame 030017/0705
Assignment of Assignor's Interest
Recorded: 2013-03-15
Pages: 11
Assignors
UMMETHALA, UPENDRA
Executed: 2012-10-03
HALE, LAYTON
Executed: 2012-09-26
CLYNE, JOSH
Executed: 2012-10-05
NAYFEH, SAMIR
Executed: 2013-01-16
WILLIAMS, MARK
Executed: 2013-01-23
DIREGOLO, JOSEPH A.
Executed: 2012-09-27
WILSON, ANDREW
Executed: 2012-09-28
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Linear Stage for Reflective Electron Beam Lithography