Patent Assignment
Reel/Frame 030021/0891
Assignment of Assignor's Interest
Recorded: 2013-03-15
Pages: 2
Assignor
ALBAREDE, LUC
Executed: 2013-03-13
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Chamber Matching Using Voltage Control Mode