Patent Assignment
Reel/Frame 030027/0490
Assignment of Assignor's Interest
Recorded: 2013-03-18
Pages: 13
Assignors
BEZEL, ILYA
Executed: 2013-02-11
SHCHEMELININ, ANATOLY
Executed: 2013-02-11
SHIFRIN, EUGENE
Executed: 2013-02-14
PANZER, MATTHEW
Executed: 2013-02-12
DERSTINE, MATTHEW
Executed: 2013-03-12
WANG, JINCHENG
Executed: 2013-03-04
CHIMMALGI, ANANT
Executed: 2013-03-06
PATIL, RAJEEV
Executed: 2013-02-27
BRUNNER, RUDOLF
Executed: 2013-02-27
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Plasma Cell for Providing Vuv Filtering in a Laser-Sustained Plasma Light Source