Patent Assignment
Reel/Frame 030039/0117
Assignment of Assignor's Interest
Recorded: 2013-03-19
Pages: 3
Assignor
MIZUNO, TSUYOSHI
Executed: 2013-03-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus