Patent Assignment
Reel/Frame 030040/0334
Assignment of Assignor's Interest
Recorded: 2013-03-19
Pages: 3
Assignors
MA, PAUL F.
Executed: 2013-03-14
LIU, GUOJUN
Executed: 2013-03-14
LAKSHMANAN, ANNAMALAI
Executed: 2013-03-11
WU, DIEN-YEH
Executed: 2013-03-12
SUBRAMANI, ANANTHA K.
Executed: 2013-03-15
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method of Depositing Metals Using High Frequency Plasma