Patent Assignment
Reel/Frame 030043/0903
Assignment of Assignor's Interest
Recorded: 2013-03-19
Pages: 3
Assignor
CHANG, CHING-YU
Executed: 2013-02-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Coating Material and Method for Photolithography