Patent Assignment
Reel/Frame 030054/0427
Assignment of Assignor's Interest
Recorded: 2013-03-21
Pages: 3
Assignors
LIU, AN-CHI
Executed: 2013-03-11
LAN, TIEN-CHENG
Executed: 2013-03-11
YU, KUEI-HSUAN
Executed: 2013-03-11
Assignee
UNITED MICROELECTRONICS CORPORATION
NO. 3, LI-HSIN RD. II, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, TAIWAN
Covered Property
(1)
Cleaning Solution and Damascene Process Using the Same