Patent Assignment
Reel/Frame 030066/0137
Assignment of Assignor's Interest
Recorded: 2013-03-22
Pages: 4
Assignors
TABAT, MARTIN D
Executed: 2013-03-19
OLSEN, CHRISTOPHER K
Executed: 2013-03-20
SHAO, YAN
Executed: 2013-03-18
MACCRIMMON, RUAIRIDH
Executed: 2013-03-21
FERNANDEZ, LUIS
Executed: 2013-03-12
Assignee
TEL EPION INC.
37 MANNING ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Gas Cluster Ion Beam Etching Process for Etching Si-Containing, Ge-Containing, and Metal-Containing Materials
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.