Patent Assignment
Reel/Frame 030068/0131
Assignment of Assignor's Interest
Recorded: 2013-03-22
Pages: 3
Assignors
FUJIMURA, AKIRA
Executed: 2013-03-14
HAGIWARA, KAZUYUKI
Executed: 2013-03-14
PACK, ROBERT C.
Executed: 2013-03-14
AADAMOV, ANATOLY
Executed: 2013-03-21
Assignee
D2S INC.
4040 MOORPARK AVENUE #250, SAN JOSE, CALIFORNIA, 95117
Covered Property
(1)
Method and System for Dimensional Uniformity Using Charged Particle Beam Lithography