Patent Assignment
Reel/Frame 030072/0417
Assignment of Assignor's Interest
Recorded: 2013-03-22
Pages: 7
Assignors
TSUJI, NAOTO
Executed: 2013-03-04
FUKAZAWA, ATSUKI
Executed: 2013-03-04
TAKAMURE, NOBORU
Executed: 2013-03-05
HAUKKA, SUVI
Executed: 2013-03-08
NISKANEN, ANTTI JUHANI
Executed: 2013-03-11
PARK, HYUNG SANG
Executed: 2013-03-06
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Forming Si-Containing Film Using Two Precursors by ALD