Patent Assignment
Reel/Frame 030097/0742
Assignment of Assignor's Interest
Recorded: 2013-03-27
Pages: 4
Assignors
SHIH, HONG
Executed: 2013-03-14
XU, LIN
Executed: 2013-03-14
KERNS, JOHN MICHAEL
Executed: 2013-03-19
CHARLES, WILLIAM
Executed: 2013-03-22
DAUGHERTY, JOHN
Executed: 2013-03-20
RAMANATHAN, SIVAKAMI
Executed: 2013-03-14
ORMOND, RUSSELL
Executed: 2013-03-21
O'NEILL, ROBERT G.
Executed: 2013-03-22
STEVENSON, TOM
Executed: 2013-03-14
Assignee
LAM RESEARCH CORPORATION
3650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Dense Oxide Coated Component of a Plasma Processing Chamber and Method of Manufacture Thereof