Patent Assignment
Reel/Frame 030104/0368
Assignment of Assignor's Interest
Recorded: 2013-03-28
Pages: 45
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Chemical Liquid Preparation Method of Preparing a Chemical Liquid for Substrate Processing, Chemical Liquid Preparation Unit Preparing a Chemical Liquid for Substrate Processing, and Substrate Processing System
Application:
13/835,073 →
Publication:
US 2013/0306238
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.