Patent Assignment
Reel/Frame 030135/0195
Assignment of Assignor's Interest
Recorded: 2013-04-02
Pages: 6
Assignor
OKADA, MITSUHIRO
Executed: 2013-03-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Forming a Laminated Semiconductor Film