Patent Assignment
Reel/Frame 030137/0951
Conversion and Name Change
Recorded: 2013-04-02
Pages: 5
Assignor
CARL ZEISS SMT INC.
Executed: 2010-09-30
Assignee
CARL ZEISS NTS, LLC
615 SOUTH DUPONT HIGHWAY, DOVER, DELAWARE, 19901-4517
Covered Property
(1)
Cooled Charged Particle Systems and Methods
Application:
13/487,433 →
Publication:
US 2013/0118184
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.