Patent Assignment
Reel/Frame 030142/0631
Assignment of Assignor's Interest
Recorded: 2013-04-03
Pages: 4
Assignors
LIN, HSIANG-WEI
Executed: 2013-03-28
CHEN, CHIA-HO
Executed: 2013-03-28
LIN, BO-HUNG
Executed: 2013-03-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
NO. 8, LI-HSIN ROAD 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Directing Plasma Distribution in Plasma-Enhanced Chemical Vapor Deposition