Patent Assignment
Reel/Frame 030149/0451
Assignment of Assignor's Interest
Recorded: 2013-04-04
Pages: 6
Assignors
TROMP, SIEGFRIED ALEXANDER
Executed: 2013-02-22
TEN KATE, NICOLAAS
Executed: 2013-01-25
LAFARRE, RAYMOND WILHELMUS LOUIS
Executed: 2013-02-14
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Substrate Holder, Lithographic Apparatus, and Device Manufacturing Method Involving a Heater and/or Temperature Sensor