Patent Assignment
Reel/Frame 030177/0063
Assignment of Assignor's Interest
Recorded: 2013-04-09
Pages: 6
Assignors
YU, KEVEN
Executed: 2013-02-12
CHANDRACHOOD, MADHAVI
Executed: 2013-03-01
SABHARWAL, AMITABH
Executed: 2013-03-07
KUMAR, AJAY
Executed: 2013-02-26
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method for Etching Euv Material Layers Utilized to Form a Photomask