Patent Assignment
Reel/Frame 030183/0716
Assignment of Assignor's Interest
Recorded: 2013-04-10
Pages: 2
Assignor
YAMAZAKI, HIROHISA
Executed: 2013-03-22
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Cleaning Method, Substrate Processing Apparatus and Non-Transitory Computer Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.