Patent Assignment
Reel/Frame 030193/0681
Assignment of Assignor's Interest
Recorded: 2013-04-11
Pages: 4
Assignors
LU, XINCHUN
Executed: 2011-12-22
XU, ZHENJIE
Executed: 2011-12-22
HE, YONGYONG
Executed: 2011-12-30
WANG, TONGQING
Executed: 2011-12-22
SHEN, PAN
Executed: 2011-12-22
ZHAO, DEWEN
Executed: 2011-12-22
MEI, HEGENG
Executed: 2011-12-22
ZHANG, LIANQING
Executed: 2011-12-22
PEI, ZHAOHUI
Executed: 2011-12-22
LUO, JIANBIN
Executed: 2012-01-02
Assignee
TSINGHUA UNIVERSITY
QINGHUAYUAN, HAIDIAN DISTRICT, BEIJING, 100084, CHINA
Covered Property
(1)
Chemical Mechanical Polishing Machine and Chemical Mechanical Polishing Apparatus Comprising the Same
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.