Patent Assignment
Reel/Frame 030199/0531
Assignment of Assignor's Interest
Recorded: 2013-04-11
Pages: 3
Assignor
VAN SCHRAVENDIJK, BART J.
Executed: 2013-04-09
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Radical Source Design for Remote Plasma Atomic Layer Deposition