Patent Assignment
Reel/Frame 030249/0497
Assignment of Assignor's Interest
Recorded: 2013-04-18
Pages: 3
Assignors
SUZUKI, AKIYOSHI
Executed: 2013-01-21
SHINODA, KEN-ICHIRO
Executed: 2013-01-21
HIURA, MITSURU
Executed: 2013-01-21
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Imprint Apparatus Including Alignment and Overlay Measurement