Patent Assignment
Reel/Frame 030253/0343
Assignment of Assignor's Interest
Recorded: 2013-04-19
Pages: 3
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Substrate Processing System Having Susceptorless Substrate Support with Enhanced Substrate Heating Control