Patent Assignment
Reel/Frame 030270/0391
Assignment of Assignor's Interest
Recorded: 2013-04-23
Pages: 9
Assignors
SINCLAIR, FRANK
Executed: 2013-03-28
GODET, LUDOVIC
Executed: 2013-04-01
MARTIN, PATRICK M.
Executed: 2013-04-22
KPISSAY, ARMAH
Executed: 2013-04-02
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Techniques for Processing Photoresist Features Using Ions